PENGARUH PARAMETER PRINTING DAN TEMPERATUR ANNEALING TERHADAP STRUKTUR DAN MORFOLOGI LAPISAN FILM TIPIS ZnO

Abstract

Abstract: ZnO films have been successfully prepared by screen printing technique using zinc acetate (ZnAc) paste. ZnAc paste was obtained from heating zinc acetate dihydrate in the medium of diethylene glycol and ethanol. The polycristal of  ZnAc paste was superimposed on top of silicon with three variations Squeegee pressure  (0 N/m2; 0.17 N/m2; and 0.69 N/m2) and washed with two variations (one and two times). ZnO film is formed through an annealing process temperature of 375, 414, 523 and 607 ^oC respectively. The analysis concluded that the surface morphology of ZnO film in the form of granules and porous, increasing the grain size of ZnO films decreases with increasing pressure and with increasing sweep Squeegee printing, but the grain size of ZnO films increases with increasing annealing temperature. It is also found that structure of ZnO films fall to hexagonal system. ZnO films with crystal orientation along the c-axis and the average crystal size of ZnO film tends to increases with increasing annealing temperature.